MEMS Microscope
Single-Axis MEMS Mirror Specifications
Parameter | Specification |
Driving Method | Electrostatic drive |
Maximum Rotation Angle | 2.2° |
Chip Size | 1.5 mm × 1.5 mm |
Mirror Diameter | 500 um |
Mirror Coating Material | Gold |
Driving Voltage @ Maximum Angle | 6.5 V |
Resonant Frequency | > 1.0 kHz |
Mirror Surface Radius | > 0.5 m |
Operating Wavelength | 500 nm ~ 2000 nm |
Maximum Optical Power | 500 MW |
Response Speed | < 10 ms |
Application | MEMS VOA |
